The considerable design freedom of our technology combined with the strong electrical conductivity of our LigaFlex© material allows us to push the limits of miniaturisation. We can therefore offer a clear competitive advantage over traditional methods.


MEMS probes can have complex geometries, with some very delicate elastic structures. Our technology offers not only excellent design freedom but also guarantees high geometrical precision.


MEMS probes come in a wide range of sizes and are usually flat pieces. The most common geometries are 'cantilever' or 'vertical buckling beam'. They are delivered either as individual parts or in sheets. This makes them easier to handle and avoids accidental bending. MEMS probes are often thin: in the region of 50 to 70 µm, which is about the thickness of a hair.


Material is an essential factor in MEMS probes applications. It must combine low electrical resistivity, good wear-resistance and high elastic properties. To date, the material that comes closest to having these characteristics is LigaFlex™, which is a NiFe alloy. Other materials that reduce electrical resistivity are currently being studied.